Semiconductor Industry FFU
Qisheng is committed to the research and production of clean room equipment for top semiconductor technology, providing customers with the most reasonable and effective overall clean air solutions, enabling our customers to achieve the effects of improving process yield, reducing energy consumption, and saving costs. Our products and services cover multiple microelectronics industries.
Packaging/Testing Industry FFU
Panel industry FFU
Semiconductor chemical filter
Panel chemical filter
Chemical filter screen for process equipment
MAU chemical filter screen for fresh air system
MAU Junior High School High Efficiency Filter for Fresh Air System
Efficient and super efficient filter replacement
EFU for process use
Top 10 Category Solutions
With the continuous reduction of functional dimensions in integrated circuit (IC) manufacturing, the control requirements of AMC are becoming increasingly strict. Since 1955, SEMI (International Semiconductor Equipment and Materials Industry Association) has been studying the impact of AMC on microelectronic manufacturing processes. In SEMI standard F21-1102, AMC is classified into four categories: MA (molecular acids), MB (molecular bases), MC (molecular organic coagulants), and MD (implantable impurities). The pollution concentration classification of each type of AMC is strictly standardized, and its pollution concentration unit is expressed in molar volume (ppb or ppt).
AMC concentration control
external environment
Clean room
·Consider the position of the air conditioning box inlet and chimney for the washing equipment
·Chemical filter installation
·Exhaust equipment and classification
·Chimney height and location planning
·Efficiency improvement of water system equipment
• Equipment and machine layout planning
Analysis of airflow inside the clean room
AMC control and construction method improvement in engineering
Airflow simulation to avoid cross contamination
• Separate maintenance and production areas
AMC emergency response facilities and procedure development
• Improvement of maintenance methods
• Climate factors
• Airflow simulation
• Analysis of nearby air sampling
• Survey of surrounding factories or facilities
• Architectural planning
Deciding to enter the clean room for air quality
Determine the concentration, type, and direction of pollutants emitted from the factory to the external environment
There are AMC pollution sources both inside and outside the cleanroom. In practical control plans, it is necessary to understand the sources and characteristics of AMC and design the most reasonable plan. The AMC in the external air (OA) is pre treated by the MAU before entering the clean room. The MAU is equipped with an intelligent water washing device (90%) and a chemical filter (90%) two-stage filtration device. Taking the external air with a MAC concentration of 50ppv as an example, the concentration of AMC entering the FAB is controlled to be below 1ppb, which meets the specifications.
N: Concentration of pollutants in C/R [μ g/m3]
M: MAU supply air pollutant concentration [μ g/m3]
K: C/R air circulation times [times/hr]
V: C/R indoor volume [m3]
G: C/R internal pollutant generation rate [μ g/hr]
a: Filter efficiency of the filter screen
s: The proportion of MAU air supply to FFU circulating air
对于AMC浓度要求严苛的FAB，可在FFU设备端以及EFU制程设备端配备化学过滤器，可进一步控制AMC的浓度。
Improve process yield and reduce production costs
Accurate/Real time/Automated
2. Pollution source database
Real time upload to database
1. Monitor pollution
The online monitoring system can quickly analyze AMC online (analysis cycle MC is 15 minutes, MA/MB is 60 minutes)
3. Pollution source analysis
Targeted treatment of pollution sources based on monitoring results
4. Real time pollution source treatment
Improve process yield and reduce production costs
IAE-800
IAE-1000
IAE-900
IAE-μGC
MA+MB
Acid-base+VOCs
(MA+MB+MC)
VOCs(MC)
VOCs(MC)
Qisheng TCO Optimal Service
In the daily operation and maintenance of clean rooms, different combinations of FFU fans, MAU washing equipment efficiency, filter material materials, and processes can also have differences in pressure loss, energy consumption, and lifespan, which can have a significant impact on customers' total cost of ownership.
If the total pressure of the fan is higher, the filter can reach its final service life! (For 12 inch semiconductor 28 nanometer process and TSMC/UMC equivalent process, this solution can be selected);
2. PTFE filter: 80Pa at 0.45m/s, efficiency of 99.9995% (U15);
If three types of chemical filters are required in the same area, a 315Pa high static pressure motor is required to simultaneously meet the pressure loss of the chemical filters. (Acid 25Pa+Alkali 25Pa+VOC25Pa)
4. The data complies with DIN24 166 technical tolerance ± 5%.
5.230Pa@0.45m /The overall efficiency of the system is 57%, 275Pa@0.45m /The overall efficiency of the machine is 58%, 320Pa@0.45m /The overall efficiency of the machine is 59%
Qisheng provides customers with TCO (Total Cost Ownership) optimization services, utilizing the concepts of local optimization, comprehensive procurement, and precise data collection to analyze equipment costs, operating costs, and execution costs, and provide customers with the best selection solutions.
Preferred solution:
Based on the customer's basic data, a preliminary plan is formed based on the overall efficiency of the fan and the pressure loss of the filter screen (35 preliminary plans are formed in this case).
2. Calculate the total cost for ten years based on the initial purchase cost and 10-year operating cost using AMCA machine testing data.
3. Select the most economical solution based on test data. Plan 29 in this case is the most economical option, which can save 22% of costs.
Qisheng has strong product capabilities in microelectronic cleanroom products, which can meet the complex needs of practical cases. With the TCO optimization service concept, it uses scientific and accurate methods and data analysis to improve the product lifecycle, reduce operating and execution costs, and lower customers' comprehensive ownership costs. While ensuring cleanliness, it achieves optimal customer benefits.
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