Real time monitoring of AMC concentration in areas such as MAU air outlet, FFU air inlet, process area, and equipment dispersion through an online monitoring system. The AMC pollution concentration in the cleanroom is calculated using the following formula, and the most suitable equipment is selected to remove AMC based on this.
N: Concentration of pollutants in C/R [μ g/m3]
M: MAU supply air pollutant concentration [μ g/m3]
K: C/R air circulation times [times/hr]
V: C/R indoor volume [m3]
G: Pollutant generation rate within C/R [μ g/hr]
A: Filtration efficiency of the filter screen
S: The proportion of MAU air supply to FFU circulating air
① Primary filter
② Bag filter
③ Intelligent washing equipment
④ Chemical filter
⑤ V-shaped filter
⑥ FFU
⑦ Efficient/Ultra Efficient Filters
⑧ HEPA BOX
⑨ EFU
⑩ TCU
⑪ TAU
⑫ AMC online monitoring
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